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Conferences > CLEOPR > 2018 > W4D > W4D.3

Nondetrimental Surface Modification of Ultrahigh-Q Photonic Crystal Silicon Nanocavities

Takahiro Ito, Kohei Ashida, Kei Kinoshita, Rai Moriya, Tomoki Machida, Kenichi Maeno, Tatsuro Endo, Koji Yamada, Makoto Okano, and Yasushi Takahashi

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Abstract

We investigated the influence of surface preparation procedures on the resonance characteristics of silicon nanocavities. We demonstrate that ultrahigh-Q factors larger than one million can be maintained when applying preparation procedures that support attaching nanomaterials.

© 2018 The Author(s)

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