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Conferences > CLEO_AT > 2013 > ATu2N > ATu2N.4

High-Speed 3D Direct Laser Writing of Micro-Optical Elements

André Radke, Benjamin Fries, Dirk Eicke, Fabian Niesler, Clemens Baretzky, Tiemo Bückmann, Martin Wegener, and Michael Thiel

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Abstract

We demonstrate high-speed diffraction-limited 3D direct laser writing using pivoted galvo mirrors. High photoresist curing speeds and stitching of individual scan fields allow for the fabrication of diffractive and refractive micro-optical elements on large areas.

© 2013 Optical Society of America

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