High-Speed 3D Direct Laser Writing of Micro-Optical Elements

André Radke; Benjamin Fries; Dirk Eicke; Fabian Niesler; Clemens Baretzky; Clemens Baretzky; Tiemo Bückmann; Tiemo Bückmann; Martin Wegener; Martin Wegener; Michael Thiel; Michael Thiel

doi:10.1364/CLEO_AT.2013.ATu2N.4

CLEO: 2013
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper ATu2N.4
•https://doi.org/10.1364/CLEO_AT.2013.ATu2N.4

High-Speed 3D Direct Laser Writing of Micro-Optical Elements

André Radke, Benjamin Fries, Dirk Eicke, Fabian Niesler, Clemens Baretzky, Tiemo Bückmann, Martin Wegener, and Michael Thiel

CLEO: Applications and Technology 2013

San Jose, California United States
9–14 June 2013
ISBN: 978-1-55752-972-5

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Micro and Nanofabrication (ATu2N)

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A. Radke, B. Fries, D. Eicke, F. Niesler, C. Baretzky, T. Bückmann, M. Wegener, and M. Thiel, "High-Speed 3D Direct Laser Writing of Micro-Optical Elements," in CLEO: 2013, OSA Technical Digest (online) (Optica Publishing Group, 2013), paper ATu2N.4.

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Abstract

We demonstrate high-speed diffraction-limited 3D direct laser writing using pivoted galvo mirrors. High photoresist curing speeds and stitching of individual scan fields allow for the fabrication of diffractive and refractive micro-optical elements on large areas.

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