Abstract
We demonstrate high-speed diffraction-limited 3D direct laser writing using pivoted galvo mirrors. High photoresist curing speeds and stitching of individual scan fields allow for the fabrication of diffractive and refractive micro-optical elements on large areas.
© 2013 Optical Society of America
PDF Article | Presentation VideoMore Like This
Y. Liao, C. Liu, F. He, L. Qiao, Y. Cheng, K. Sugioka, and K. Midorikawa
CM1H.1 CLEO: Science and Innovations (CLEO_SI) 2013
Michael Moebius, Kevin Vora, SeungYeon Kang, Philip Munoz, Guoliang Deng, and Eric Mazur
SW1K.6 CLEO: Science and Innovations (CLEO_SI) 2015
Liang (Leon) Yuan and Peter R. Herman
CTh1J.4 CLEO: Science and Innovations (CLEO_SI) 2013