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Photonic integrated circuit with multiple waveguide layers for broadband high-efficient 3-D OPA

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Abstract

We demonstrated a 3-D optical phased array device, based on multi-layer Si3N4/SiO2 stacks. The multi-waveguide-layer configuration allows utilizing edge couplers at both the input and the emitting ends to achieve broadband high efficiency.

© 2023 The Author(s)

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