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Conferences > CLEO_AT > 2023 > JTu2A > JTu2A.28

Film thickness measurement on transparent substrate based on spectral interference ellipsometry

Jinxu Zhang, Jiayang Chen, Ruixue Zhang, Liheng Shi, and Guanhao Wu

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Abstract

We proposed a thickness measurement method of film without the frustration of back-surface reflection. It directly separated the back reflection information from transparent substrate in Fourier domain. The measurement precision was better than 1 nm.

© 2023 The Author(s)

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