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Conferences > CLEO_AT > 2023 > JW2A > JW2A.12

Permanent Trimming of Large-Scale Photonic Circuits with a Focused Silicon Ion Beam

Akhil Varri, Frank Brückerhoff-Plückelmann, Shabna Taheriniya, Daniel Bernhardt, Torsten Richter, Gerhard Wilde, and Wolfra H. Pernice

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Abstract

We present a novel approach for scalable, permanent trimming of silicon nitride ring resonators with Si ion implantation. Using this approach, we tune ring resonators in a low-loss photonic crossbar array for matrix-vector multiplications.

© 2023 The Author(s)

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