Abstract

Ablation using short wavelength lasers is one of the promising techniques for microfabrication of solid surfaces. Most of the studies have been concentrated on organic materials and polymers.¹ Few works on quartz materials have been carried out, although the materials are of great use for optics and optelectronics. In the present paper, novel ablation of fused quartz is demonstrated by multiwavelength irradiation of a vacuum-ultraviolet (VUV) laser using high-order anti-Stokes stimulated Raman scattering.

© 1994 IEEE