Abstract

Objective of this work is the development of electrostatically controlled adaptive mirror, which is integrated into silicon chip. Integrated mirror combines the advantages of micro-machined device—low cost, tolerance for mass production, and IC compatibility^1-4 with geometrical quality, attributed to traditional optics. Applications as a stand-alone adaptive optical element^5,6 as well as adaptive component of integrated optoelectronical device³ may be regarded. Technology of fabrication permits integration of electrostatic actuators together with control electronics, which simplifies the structure of adapative optical system.

© 1994 IEEE