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Selective ablation of the amorphous silicon layer by the second-harmonic wave of the TEA CO2 laser

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Abstract

TEA CO2 lasers operate efficiently with high output energy and are expected to open up new applications in the industrial field. The TEA CO2 laser can oscillate at a single line between 9 and 11 µm with a high peak power pulse which is strongly absorbed by a vibrational- rotational line of the organic polymer materials. The efficient ablation of the organic polymer materials such as polyether ether ketone and polyether sul- phone by single line selected TEA CO2 lasers was successfully demonstrated.1

© 1994 IEEE

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