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On the influence of material properties on the high speed behavior of metalsemiconductor-metal photodetectors

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Abstract

With respect to today's optical communication systems using bitrates in the regime of several 10 GHz, the understanding of ultrafast processes in semiconductor devices with sub-micron dimensions is of growing importance for device optimization. MSM photodetectors commonly fabricated on semi-insulating materials are very promising for system applications,1,2 because of their simple planar structure, high frequency response, low dark currents, and process compatibility to MESFET technology. However, the pulse response with very short rise- and FWHM-times of the detectors is often deteriorated by a long exponential tail.

© 1994 IEEE

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