Abstract

Although some polysilicon-based products, such as liquid crystal light valves, are already on the market, it is generally agreed that they are too costly for consumer applications, because they need to be fabricated al high temperature, on quartz substrates, An order to extend the application of polysilicon, low temperature, glass compatible processes have been actively studied over the past few years and pulsed excimer laser processing is new emerging.

© 1996 IEEE