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Conferences > CLEO_Europe > 1996 > CWF > CWF49

High-Accuracy Measurements of the Spacing of Diffraction Gratings in the Range 0.28 μm - 0.50 μm Using Laser Interferometric Diffractometry

V. I. Korotkov, S. A. Pulkinl, A. L. Vitushkin, and L. F. Vitushkin

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Abstract

At the BIPM and the VNIIM laser interferomctric diffractometers (LID) [1,2] have been constructed for high-accuracy measurements of the spacings of diffraction gratings. The least measurable spacing is λ/2 where λ is wavelength of laser radiation in use. Periodic short-length line scales incorporating diffraction gratings have been developed. These can be used for the calibration of high precision length measuring systems in micrometre and nanometre ranges.

© 1996 IEEE

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