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Theoretical and Experimental Studies of Back-Gated Metal-Semiconductor-Metal Photodetectors

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Abstract

The back-gated metal-semiconductor-metal photodetector is a hybridisation of a metal-Semiconductor-metal Photodetector and a pin photodiode. Top contacts are made to two n-regions which are isolated by etching down to the intrinsic region. A third contact is made to the bottom p-region(see figure 1).

© 1998 IEEE

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