Abstract
Today the Shack-Hartmann sensor (SHS) has matured to a tool in optical metrology which is able to compete to some extend with interferometry. The comparison of the performance of the SHS and interferometry in absolute sphericity tests is presented.
© 1998 IEEE
PDF ArticleMore Like This
J. Pfund, N. Lindlein, J. Schwider, R. Burow, K.-E. Elßner, and Th. Blümel
OWB.1 Optical Fabrication and Testing (OF&T) 1998
J. Pfund and J. Schwider
CWF119 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2000
Johannes Pfund, Norbert Lindlein, and Johannes Schwider
OTuC5 Optical Fabrication and Testing (OF&T) 2000