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Conferences > CLEO_Europe > 2000 > CFD > CFD4
  • Conference on Lasers and Electro-Optics Europe
  • Technical Digest Series (Optica Publishing Group, 2000),
  • paper CFD4

The Laser Ion Implantation Facility (LIIF): Design & First Results

P. Boody, J. Kempf, R. Höpfl, H. Hora, L. Láska, L. Juha, K. Rohlena, J. Krása, M. Pfeifer, E. Woryna, J. Wolowski, and V. Pefina

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Abstract

The Laser Ion Implantation Facility has been designed to study the commercial feasibility of laser ion implantation using an industrial excimer laser. Design details and first results of characterizing the ion source and implanting ions will be presented.

© 2000 IEEE

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