Abstract

Transparent conductive thin film (indium tin oxide, ITO) is mainly used for information display element such as liquid crystal display and touch panel · in addition, the film production to the temperature-sensitive substrate like plastic film has also been required in order to display information in various places However, it is reported that the crystallinity of the film is bad, because the film can not be made for this substrate at high temperature state (~200°C) Therefore, it becomes the research goal that that high transparent and low conductivity film is produced on such a substrate at low-temperature (<100°C)

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