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Conferences > CLEO_Europe > 2021 > cm_6 > cm_6_5
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_6_5

Femtosecond Fabrication of 3D Free-Form Functional Glass Microdevices: Burst-Mode Ablation and Selective Etching Solutions

Deividas Andriukaitis, Agnė Butkute, Tomas Baravykas, Rokas Vargalis, Jokūbas Stančikas, Titas Tičkūnas, Valdas Sirutkaitis, and Linas Jonušauskas

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Abstract

We investigate and compare the advantages and drawbacks of two advanced femtosecond direct laser writing methods direct ablation using burst mode fabrication and selective glass etching for potential applications in microfluidics, micromechanics and microoptics.

© 2021 IEEE

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