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Conferences > CLEO_Europe > 2023 > ch_3 > ch_3_5
  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper ch_3_5

Near-IR detection using Photothermal Actuation of Guided-Mode Resonance MEMS Structures in Germanium

Pavithra Rao, Dipak Rout, and Shankar Kumar Selvaraja

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Abstract

Miniature infrared (IR) photodetection schemes are instrumental for integrated photonics applications in gas sensing, free-space communication, thermal imaging etc. Though MEMS-based bolometric[1] and photothermal detectors [2] are widely used in literature, they lack wavelength selectivity. Photonic structures coupled with MEMS architectures can offer wavelength selectivity and switching.

© 2023 IEEE

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