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Conferences > CLEO_FS > 2023 > FM3D > FM3D.6

Extreme Ultraviolet Metaoptics enabled by Vacuum Guiding

Marcus Ossiander, Hana K. Hampel, Maryna L. Meretska, Soon Wei D. Lim, Nico Knefz, Thomas Jauk, Martin Schultze, and Federico Capasso

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Abstract

We experimentally demonstrate a dielectric metalens operating at 50 nm wavelength by leveraging that holes in a Silicon membrane guide extreme ultraviolet light. A knife edge measurement shows focusing down to 1.7 times the diffraction limit.

© 2023 The Author(s)

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