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Ultra-high-Q microcavities fabricated on fused silica chips by three-dimensional femtosecond laser microfabrication

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We report on fabrication of ultra-high-Q (~106) whispering gallery microcavities on a fused silica chip using a femtosecond laser, enabled by the high spatial resolution and three-dimensional nature of femtosecond laser direct writing.

© 2012 Optical Society of America

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