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Heterogeneous Microring and Mach-Zehnder Lithium Niobate Electro-Optical Modulators on Silicon

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Heterogeneous integration of submicron films of lithium niobate on silicon substrates, rib-loaded with chalcogenide glass, is used to demonstrate lithium niobate microring modulators with Q of 1.2×105 and Mach-Zehnder modulators with Vπ.L of 3.8 V.cm.

© 2015 Optical Society of America

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