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Conferences > CLEO_SI > 2020 > SW3F > SW3F.5

Material Deposition with Spatial Thickness Variation for Reflective Color Filter

Xinhao Li, Zheng Jie Tan, and Nicholas X. Fang

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Abstract

A new material deposition method to pattem 2D structures with spatial thickness variation using single fixed shadow mask is demonstrated. The method is applied to fabricate multispectral reflective color filter arrays of high customizability

© 2020 The Author(s)

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