Process-Related Thickness Variations in Spin-On Interference Filters

Dunbar P. Birnie; M. Manley; B. J. J. Zelinski; S. M. Melpolder

doi:10.1364/OIC.1995.TuD3

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1995),
paper TuD3
•https://doi.org/10.1364/OIC.1995.TuD3

Process-Related Thickness Variations in Spin-On Interference Filters

Dunbar P. Birnie, M. Manley, B. J. J. Zelinski, and S. M. Melpolder

Optical Interference Coatings 1995

Tucson, Arizona United States
5–9 June 1995
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Deposition and Process: 4 (TuD)

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D. P. Birnie, M. Manley, B. J. J. Zelinski, and S. M. Melpolder, "Process-Related Thickness Variations in Spin-On Interference Filters," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1995), paper TuD3.

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Abstract

Optical interference filters can easily be fabricated from high and low index transparent coatings using a number of different processing routes. One inexpensive method for depositing oxide coatings is through spin-on chemical routes [1-3].

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