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Conferences > CLEO_SI > 2022 > SF4G > SF4G.2

Piezoelectric High-Speed Spatial Light Modulator Based on Guided-Mode Resonances

Artur Hermans, Ian R. Christen, Christopher Panuski, Matthew Zimmermann, Andrew J. Leenheer, Mark Dong, Gerald Gilbert, Matt Eichenfield, and Dirk Englund

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Abstract

We demonstrate a high-speed spatial light modulator technology based on a silicon nitride platform fabricated in a CMOS process. Using piezoelectrically modulated guided-mode resonances, we can reach bandwidths over 10 MHz for a single pixel.

© 2022 The Author(s)

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