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Conferences > CLEO_SI > 2022 > STu5G > STu5G.1

Compact Piezoelectric Photonic Crystal Modulator in a Visible-NIR 200 mm CMOS Architecture

David Heim, Y. Henry Wen, Mark Dong, Hugo Larocque, Andrew J. Leenheer, Gerald Gilbert, Matt Eichenfield, Mikkel Heuck, and Dirk R. Englund

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Abstract

We demonstrate a silicon nitride photonic crystal cavity modulated via piezo-mechanical actuators fabricated in a broadband CMOS platform. We measure >25 dB extinction with Fano resonances in a small footprint Mach-Zehnder interferometer configuration.

© 2022 The Author(s)

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