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Conferences > FiO > 2021 > FW6B > FW6B.3

High-Speed, Cryogenically Compatible, and Visible-Wavelength Photonic Circuits in a 200 mm CMOS Architecture

Mark Dong, Genevieve Clark, Andrew J. Leenheer, Matthew Zimmermann, Daniel Dominguez, Adrian J. Menssen, David Heim, Gerald Gilbert, Dirk Englund, and Matt Eichenfield

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Abstract

We introduce a 200 mm CMOS-compatible integrated photonics platform that uses aluminum nitride piezo-actuators coupled to silicon nitride waveguides, enabling strain-based phase modulation rates greater than 100 MHz in the visible-NIR wavelengths.

© 2021 The Author(s)

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