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High-Yield Large-Scale Optical Phased Array with Flip-Chip CMOS ASIC

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Abstract

We present >99% yield and consistent beam forming performance across ten optical phased array modules each with a 1024-element array, flip-chip assembled CMOS ASIC, and interfacing microcontroller, enabling robust performance in applications such as LiDAR.

© 2023 The Author(s)

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