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Conferences > CLEO_SI > 2023 > STh4O > STh4O.5

Thin-Film Lithium Niobate Electro-Optic Modulators with Integrated Silicon Photonic Thermo-Optic Phase Shifters

Nicholas A. Boynton, Thomas A. Friedmann, Shawn C. Arterburn, Katherine M. Musick, Matthew S. Boady, Andrew L. Starbuck, Douglas C. Trotter, Andrew S. Pomerene, Ashok Kodigala, Anthony L. Lentine, Paul A. Morton, and Michael R. Gehl

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Abstract

TFLN/silicon photonic modulators featuring active silicon photonic components are reported with a Vπ of 3.6 Vcm. This hybrid architecture utilizes the bottom of the buried oxide as the bonding surface which features minimum topology.

© 2023 The Author(s)

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