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Conferences > CLEO_SI > 2023 > STh4O > STh4O.6

Pillar-Based High-Yield Heterogeneous Integration of Lithium Niobate and Gallium Phosphide Thin Films

Tom Vandekerckhove, Tom Vanackere, Jasper De Witte, Stijn Cuyvers, Luis Reis, Maximilien Billet, Günther Roelkens, Stéphane Clemmen, and Bart Kuyken

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Abstract

Several established photonic platforms lack a nonzero Pockels and nonlinear coefficient. We developed a micro-transfer printing method to heterogeneously integrate thin-film lithium niobate and gallium phosphide with an experimentally shown transfer yield of near-unity.

© 2023 The Author(s)

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