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Conferences > COSI > 2022 > CF1D > CF1D.5

Multi-purpose high-resolution nanoscale table-top ptychography at 13.5 nm

C. Liu, W. Eschen, L. Loetgering, V. Schuster, R. Klas, A. Kirsche, L. Berthold, A. Iliou, M. Steinert, T. Pertsch, F. Hillmann, M. Krause, J. Limpert, and J. Rothhardt

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Abstract

We present our latest results on table-top ptychographic imaging at 13.5 nm. An overview and the identification of interesting areas are achieved with infrared illumination. XUV illumination provides sub-20-nm-resolution amplitude- and phase images.

© 2022 The Author(s)

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