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Conferences > COSI > 2023 > CM4B > CM4B.6

High-performance EUV Ptychography at 13.5 nm

W. Eschen, C. Liu, D. S. Penagos Molina, R. Klas, J. Limpert, and J. Rothhardt

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Abstract

We present table-top high-speed EUV ptychography at 13.5 nm. Employing a novel sCMOS detector enables 5x faster wide-field imaging with an imaging speed of 4.6 Mpix/h. Further, Hertz-scale high-resolution EUV wavefront sensing is demonstrated.

© 2023 The Author(s)

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