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Conferences > DFM > 1995 > DEDS > DEDS121
  • Applications of Diamond Films and Related Materials: Third International Conference
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper DEDS121

A Thermal-Sensitive Device Fabricated with Diamond Film and A Planar Microelectrode

Changzhi Gu, Zengsun Jin, Xianyi Lu, Guangtian Zou, and Qiang Meng

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Abstract

Polycrystalline diamond film were deposited by means of the hot filament CVD technique (HFCVD) onto a planar interdigital Ti microelectrod arrays, and forming a thermal-sensitive device. The resistor changes of diamond film caused by temperature are shown to be sensitive, reproducible, rapid and stable thermal-sensitive device. The characteristics of thermal-sensitive for this device was study. Functionalized diamond film deposited onto planar microelectrode arrays can easily detect temperature from 20°C to 700°C.

© 1995 Optical Society of America

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