Design and Production of Diamond Devices

W. Haenni; J. P. Dan; A. Perret; J. P. Thiébaud; P. Weiss

Applications of Diamond Films and Related Materials: Third International Conference
Technical Digest Series (Optica Publishing Group, 1995),
paper DEDS83

Design and Production of Diamond Devices

W. Haenni, J. P. Dan, A. Perret, J. P. Thiébaud, and P. Weiss

Applications of Diamond Films and Related Materials 1995

Gaithersburg, MD United States
21–24 August 1995
ISBN:

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Diamond–Electron Devices and Sensors (DEDS)

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W. Haenni, J. P. Dan, A. Perret, J. P. Thiébaud, and P. Weiss, "Design and Production of Diamond Devices," in Applications of Diamond Films and Related Materials: Third International Conference, Technical Digest Series (Optica Publishing Group, 1995), paper DEDS83.

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Abstract

The outstanding properties of thin diamond films (hardness, chemical inertness, high thermal conductivity, high transparency, etc.) make them a good candidate for sensors, electronic or micromechanical devices, either self-standing or as part of microsystems [1-14].

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