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Conferences > DFM > 1995 > DGGC > DGGC321
  • Applications of Diamond Films and Related Materials: Third International Conference
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper DGGC321

Hetero-Epitaxy of Diamond Film on Silicon

Zhangda Lin, Jie Yang, Kean Feng, and Yan Chen

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Abstract

Local hetero-epitaxial diamond films (100) and (111) on silicon (100) were obtained, results were discussed. Simulation of the hetero-epitaxy process was conducted by a HREELS study of the interactions of activated H2, CH4 with silicon covered by C2H2.

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