Abstract

The successful utilization of premixed oxygen-acetylene flames in the chemical vapor deposition (CVD) of diamond has led to an interest in scalable configurations. A stagnation-flow reactor is scalable and can provide the uniform species and heat fluxes necessary for CVD diamond deposition over large surface areas. The present work describes such a scaled-up reactor (2-inch diameter films) along with the relevant engineering considerations, including burner configuration, flame stabilization, and substrate thermal management.

© 1995 Optical Society of America