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  • Applications of Diamond Films and Related Materials: Third International Conference
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper DLCBM769

Diamond-Like Atomic-Scale Composite Films: Surface Properties and Stability Studied by STM and AFM

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Abstract

Amorphous "diamond-like/quartz-like" composites a-(C:H/Si:O) and metal containing a-(C:H/Si:O/Me) constitute a novel class of diamond-related materials with a number of unique bulk and surface properties. In order to gain a more fundamental understanding of the surface properties and stability of these solids we have performed a scanning tunneling and atomic force microscopy investigation of both a-(C:H/Si:O) and a-(C:H/Si:O/Me) films, including the effects of ion bombardment and annealing.

© 1995 Optical Society of America

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