Abstract

The reputation of diamond as the material with the highest dielectric strength of all known insulators has led to interest in its application as a dielectric for high voltage, energy storage capacitors. "Diamondlike" carbon (DLC) films, which exhibit properties very near those of diamond and which can be synthesized routinely on a variety of substrates with uniformity over large areas, may prove to be an equally or even more attractive candidate dielectric for the same high voltage capacitor applications. In this study thin film capacitors were fabricated and voltage conditioned. Then the electrical properties, including dielectric strength, of the DLC films were determined.

© 1995 Optical Society of America