Abstract

The diamond-like carbon films have been deposited on zincselenide by hybrid method. In the first stage, the deposition was used by the dual graphite target sputtering method, AC current 65-70 mA, voltage of 540-840 V in the pressure of 300 mTorr, high purified argon atmosphere, this process taking one hour. Secondly, chemical vapor deposition (CVD) was performed using 500 W of microwave power at frequency 2450 MHz, in the mixed gas pressure about 2000 mTorr (Ar : 350 mTorr, H₂:1400 mTorr, methanol vapour :250 mTorr ) for times of 5, 15, 30, 45 hours. The samples were examined by optical microscope (magnification 100 or 400 times) and by infrared absorption (4000-200 cm^-1) which showed absorption peaks from C-H stretching mode vibrations at 2860,2880,2920 and 2960 cm^-1 . The adhesion test is using the tunsten tip scratching on the DLC surface by spring load strength 122.9 gram in weight.

© 1995 Optical Society of America