Anodic Bonding of Diamond to Glass

R. Fuentes; L.M. Trolio; J.E. Butler

Applications of Diamond Films and Related Materials: Third International Conference
Technical Digest Series (Optica Publishing Group, 1995),
paper DO581

Anodic Bonding of Diamond to Glass

R. Fuentes, L.M. Trolio, and J.E. Butler

Applications of Diamond Films and Related Materials 1995

Gaithersburg, MD United States
21–24 August 1995
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Diamond Optics (DO)

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R. Fuentes, L. M. Trolio, and J. E. Butler, "Anodic Bonding of Diamond to Glass," in Applications of Diamond Films and Related Materials: Third International Conference, Technical Digest Series (Optica Publishing Group, 1995), paper DO581.

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Abstract

A method is described for anodically bonding smooth nanocrystalline diamond films to glass substrates to form extremely flat diamond membranes with the smoothest side available of patterning absorber structures to form masks for proximity focused xray lithography.

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