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Optica Publishing Group
  • Applications of Diamond Films and Related Materials: Third International Conference
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper S11

Examination of Electron Field Emission Efficiency and Homogeneity from CVD Diamond Films

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Abstract

This paper presents the results of the investigation of electron emission efficiency and homogeneity from diamond films. Diamond films were grown by plasma enhanced DC glow discharge method on Si and Mo substrates with the diameter up to 30mm. For the best films the emission “switch-on” threshold is 8 V/micron and at 1 OV/micron the emission current density exceeds 50μA/mm2.

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