Abstract

Chemical beam epitaxy(CBE) method is introduced to carry out the study of cBN deposition on well-defined surfaces and the in-situ observation of the surfaces using an RHEED(reflection high energy electron diffraction)-TRAXS( total reflection angle X-ray spectroscopy) system[1]. The CBE study is theoretically assisted by semiempirical MO calculations of nanocrystals to model hydrogenated surfaces of cBN[2]. The (100)N was found unique because it stabilizes as fully-hydrogenated dihydride structure. On the other hand, the (100)B was predicted to stabilize as monohydride structure, which is similar to hydrogenated surface of diamond(100). Photo-assisted depassivation of the (100)N is suggested by the spatial distribution of the LUMO.