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Conferences > DH > 2011 > DWC > DWC9

Holographic Recording of Vertical Surfaces

Florian Bryce Soulard, Richard McWilliam, Joshua J. Cowling, Alan Purvis, Gavin L. Williams, N. Luke Seed, Jesus J. Toriz-Garcia, and Peter A. Ivey

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Abstract

A simple method is presented for recording vertical surfaces along with horizontal surfaces in a standard DHM set-up. The purpose is to avoid rotating the sample, which would require new alignment and calibration procedures. The main targeted application is the recording of the top surface and vertical sides of a silicon chip in a single process.

© 2011 Optical Society of America

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