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Foundry fabrication for diffractive optical elements

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Abstract

Batch fabrication of multiple projects to spread the non-recurring costs and therefore reducing the cost of prototype custom circuits has been carried out for silicon integrated circuits (MOSIS). Recent efforts along this line include batch fabrication of optoelectronic devices through the CO-OP program. In this talk, we will discuss issues involved in providing multi-project foundry fabrication of diffractive optical elements through the binary optics approach. Cost comparison with other competing technologies will be made.

© 1996 Optical Society of America

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