Critical Components for Integrated Diamond Photonic Devices

Steven Prawer; David Jamieson; Daniel Creedon; Kumar Ganesan; Nadarajah Athavan; Alastair Stacey

doi:10.1364/DP.2019.89

Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications
OSA Technical Digest (Optica Publishing Group, 2019),
paper 89
•https://doi.org/10.1364/DP.2019.89

Critical Components for Integrated Diamond Photonic Devices

Steven Prawer, David Jamieson, Daniel Creedon, Kumar Ganesan, Nadarajah Athavan, and Alastair Stacey

Diamond Photonics - Physics, Technologies and Applications 2019

Lausanne Switzerland
19–22 May 2019
ISBN:

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Integrated Photonics (INT)

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S. Prawer, D. Jamieson, D. Creedon, K. Ganesan, N. Athavan, and A. Stacey, "Critical Components for Integrated Diamond Photonic Devices," in Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications, OSA Technical Digest (Optica Publishing Group, 2019), paper 89.

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Abstract

Here, we describe a scalable fabrication method for single crystal diamond membrane windows that achieves three major goals with one fabrication method: providing high quality diamond, as confirmed by Raman spectroscopy; achieving homogeneously thin membranes, enabled by ion implantation; and providing compatibility with established planar fabrication via lithography and vertical etching. The membranes serve as the substrate for the fabrication of integrated diamond photonic technologies.

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