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Conferences > EQEC > 1996 > JThA > JThA5
  • European Quantum Electronics Conference
  • Technical Digest Series (Optica Publishing Group, 1996),
  • paper JThA5

Writing Nanostructures with a Helium Beam

S. Nowak, T. Pfau, and J. Mlynek

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Abstract

It is of considerable technological interest how new processes for nanofabrication can be used to go beyond resolution limits of optical lithography. The requirements for such new technologies are high resolution, parallel writing and the possibility to form aperiodic structures.

© 1996 IEEE

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