Multilayer Optics for the CUV: Synthesis, Experimental Results, and Projected Performance

Troy W. Barbee

doi:10.1364/EUV.1984.TuC1

Second Topical Meeting on Laser Techniques in the Extreme Ultraviolet
Technical Digest Series (Optica Publishing Group, 1984),
paper TuC1
•https://doi.org/10.1364/EUV.1984.TuC1

Multilayer Optics for the CUV: Synthesis, Experimental Results, and Projected Performance

Troy W. Barbee

Laser Techniques in the Extreme Ultraviolet 1984

Boulder, Colorado United States
5–7 March 1984
ISBN:

From the session
Mirrors, Optics, and Microscopy (TuC)

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T. W. Barbee, "Multilayer Optics for the CUV: Synthesis, Experimental Results, and Projected Performance," in Second Topical Meeting on Laser Techniques in the Extreme Ultraviolet, Technical Digest Series (Optica Publishing Group, 1984), paper TuC1.

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Abstract

Advanced vapor deposition techniques have yielded a new class of multi-layer optics for soft X-rays. Applications of these processes to fabrication of XUV optics promises significant improvements. Synthesis processes, current experimental results, and projected performance are discussed.

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