Abstract

Multilayer x-ray optics are becoming increasingly important in diverse applications such as x-ray projection lithography¹, x-ray laser cavities², x-ray microscopy³, astronomy⁴ and spectroscopy⁵. In this paper we focus on the current development of normal incidence reflective optics for the soft x-ray spectrum of ~45 - 130 Å. The ultimate goal is to develop a soft x-ray imaging system capable of high throughput and diffraction-limited performance over an appropriate image field.

© 1991 Optical Society of America