Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Oscar O. Versolato; Oscar O. Versolato; Oscar O. Versolato; Oscar O. Versolato; Ruben Schupp; Ruben Schupp; Ruben Schupp; Ruben Schupp; Lars Behnke; Lars Behnke; Lars Behnke; Lars Behnke; Yahia Y. Mostafa; Yahia Y. Mostafa; Yahia Y. Mostafa; Yahia Y. Mostafa; Zoi Bouza; Zoi Bouza; Zoi Bouza; Zoi Bouza; Adam Lassise; Adam Lassise; Adam Lassise; Adam Lassise; Muharrem Bayraktar; Muharrem Bayraktar; Muharrem Bayraktar; Muharrem Bayraktar; John Sheil; John Sheil; John Sheil; John Sheil; Ronnie Hoekstra; Ronnie Hoekstra; Ronnie Hoekstra; Ronnie Hoekstra; Wim Ubachs; Wim Ubachs; Wim Ubachs; Wim Ubachs

doi:10.1364/EUVXRAY.2022.ETh5A.7

Optica High-brightness Sources and Light-driven Interactions Congress 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ETh5A.7
•https://doi.org/10.1364/EUVXRAY.2022.ETh5A.7

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Oscar O. Versolato, Ruben Schupp, Lars Behnke, Yahia Y. Mostafa, Zoi Bouza, Adam Lassise, Muharrem Bayraktar, John Sheil, Ronnie Hoekstra, and Wim Ubachs

Compact EUV & X-ray Light Sources 2022

Budapest Hungary
21–25 March 2022
ISBN: 978-1-957171-06-7

From the session
Sources-IV: E-beam and Laser-Driven Plasma (ETh5A)

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O. O. Versolato, R. Schupp, L. Behnke, Y. Y. Mostafa, Z. Bouza, A. Lassise, M. Bayraktar, J. Sheil, R. Hoekstra, and W. Ubachs, "Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV," in Optica High-brightness Sources and Light-driven Interactions Congress 2022, Technical Digest Series (Optica Publishing Group, 2022), paper ETh5A.7.

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Abstract

Extreme ultraviolet (EUV) nanolithography relies on CO₂-lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.

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