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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FMJ6
  • https://doi.org/10.1364/FIO.2009.FMJ6

Ultra Small Silicon Resonator Based Temperature Sensor

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Abstract

An ultra small temperature sensor was proposed and implemented utilizing a silicon ring resonator with a 4-μm ring radius. The observed sensitivity was ~85 pm/°C over the 38°C range around the room temperature.

© 2009 Optical Society of America

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