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Conferences > FiO > 2023 > FD1 > FD1.1

Method for Plasma Damage Assessment of Optics

Dakshin Tillo, Jagroop, C S Narayanamurthy, and D Sam Dayala Dev

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Abstract

A novel measurement setup based on Digital Holography Microscopy in reflection and Total internal reflection mode is developed for quantitative assessment of plasma damage of fused silica optics

© 2023 The Author(s)

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