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Conferences > HILAS > 2022 > HW2B > HW2B.2

TI-REX: a 5->20ns Temporally Shapeable and 1.4-4.4µm Wavelength-tunable Source for Nanolithography

Zeudi Mazzotta, Jan Mathijssen, Oscar Versolato, Kjeld Eikema, and Stefan Witte

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Abstract

TI-REX is a self-seeded nanosecond (5-20ns) parametric amplifier with wide wavelength tunability (1.4-4.4µm) and high-resolution (0.25ns) temporal shaping capability. It enables systematic studies on laser produced plasmas and the wavelength-dependence of extreme-ultraviolet generation efficiency.

© 2022 The Author(s)

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